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光學電子束蒸發式鍍膜機

詳細說明

產品特點：

設備專門用于IT制造業結構件真空鍍膜加工，各系統單元和總體構成滿足光學和功能薄膜生產工藝要求，蒸發鍍膜方式，生產效率高，加工范圍寬，適用于AR膜，NCVM顏色膜、金屬裝飾膜、金屬功能膜、AF功能膜等。

該鍍膜機采用立式箱體，前置室門上裝有觀察窗，頂部安裝夾具傘架，底部安裝蒸發源和離子源，

后置排氣法蘭連接高真空泵；

1）前級真空：由旋片泵、羅茨泵構成；

2）高真空：擴散泵、超低溫冷凝水捕集泵（Polycold）, 真空室和擴散泵冷阱。

3）抽氣系統：由各級泵、管道和閥門，在系統的控制下完成啟動、粗抽精抽、待命和維持流程。

主要技術參數

1、成膜系統

1）電子槍：10KW, 電子束偏轉角 270 度;

2）終端霍爾型離子源，3KW。

3）雙舟阻抗式蒸發源（共5KW），用于鍍制 AF 膜層。

2、工作模式：

離子清洗、電子束蒸發，石英晶體薄膜厚度控制器監控膜厚并自動判停。

3、工藝流程:

裝夾 - 抽真空 - 離子清洗 –電子槍蒸鍍- 阻抗式蒸發AF - 進氣、出爐。

4、功率：

總功率 120KW，平均功率60KW。

5、設備外尺寸及總重:

1)主框架及控制柜，不開門 W5600×D6300×H3170，開門 W5600×D8500×H3170。

2）粗抽泵組及粗抽管占地：W2000×D1500。

3）主框架外部必要的操作和維護維護空間：水平方向外延伸 800mm; 垂直向上延伸 400mm。

4）總重：15 噸

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