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光學電子束蒸發式鍍膜機

    詳細說明

    產品特點: 

     設備專門用于IT制造業結構件真空鍍膜加工,各系統單元和總體 構成滿足光學和功能薄膜生產工藝要求,蒸發鍍膜方式,生產效率高,加工范圍寬,適用于AR膜,NCVM顏色膜、金屬裝飾膜、金屬功能膜、AF功能膜等。 

     該鍍膜機采用立式箱體,前置室門上裝有觀察窗,頂部安裝夾具傘架,底部安裝蒸發源和離子源,

    后置排氣法蘭連接高真空泵;

    1)前級真空:由旋片泵、羅茨泵構成;

    2)高真空:擴散泵、超低溫冷凝水捕集泵(Polycold, 真空室和擴散泵冷阱。

    3)抽氣系統:由各級泵、管道和閥門,在系統的控制下完成啟動、粗抽精抽、待命和維持流程。

    主要技術參數

       1、成膜系統

    1)電子槍:10KW, 電子束偏轉角 270 ;

    2)終端霍爾型離子源,3KW。

    3)雙舟阻抗式蒸發源(共5KW),用于鍍制 AF 膜層。


       2、工作模式

    離子清洗、電子束蒸發,石英晶體薄膜厚度控制器監控膜厚并自動判停。


       3、工藝流程:

    裝夾 - 抽真空 - 離子清洗 –電子槍蒸鍍- 阻抗式蒸發AF - 進氣、出爐。 


       4、功率

    總功率 120KW,平均功率60KW。


       5、設備外尺寸及總重:

    1)主框架及控制柜,不開門 W5600×D6300×H3170,開門 W5600×D8500×H3170。 

    2)粗抽泵組及粗抽管占地:W2000×D1500。 

    3)主框架外部必要的操作和維護維護空間:水平方向外延伸 800mm; 垂直向上延伸 400mm。

    4)總重:15



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