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磁控AF鍍膜機

    詳細說明

    產品特點:

    設備專門用于IT制造業結構件AF/AS鍍膜加工,各系統 單元和總體構成滿足AF/AS功能薄膜生產工藝要求。 

          該鍍膜機采用立式箱體,前置室門上裝有觀察窗,箱內安裝轉架驅動,爐內安裝烘烤系統,后置排氣法蘭連接高真空泵。

    1)前級真空:由旋片泵、羅茨泵構成;

    2)高真空:擴散泵、超低溫冷凝水捕集泵(Polycold, 真空室和擴散泵冷阱。

    3)抽氣系統:由各級泵、管道和閥門,在系統的控制下完成啟動、粗抽精抽、待命和維持流程。

    主要技術參數:

       1、成膜系統

    1)中頻電源、旋轉陰極孿生圓柱靶 *1, 另外預留一對靶位(電源可轉換分別驅動兩套靶)。

    2)10舟阻抗式蒸發源*2;

    3)離子轟擊棒*4。


       2、工作模式

    離子清洗、 磁控濺射、阻抗式蒸發。


       3、工藝流程:

    裝夾-抽真空-離子清洗-磁控反應濺射二氧化硅膜層-阻抗式蒸發 AF- 進氣、 出爐。 


     4、功率

    總功率 148KW,平均功率48KW;


       5、設備外尺寸及總重:

    1)主框架及控制柜,不開門W4500 X D600 X H3250,開 W4500 X D7300 X H3250。 

    2)粗抽泵組及粗抽管占地:W2000 X D1500。

    3)主框架外部必要的操作和維護維護空間:水平方向外延伸 800mm; 垂直向上延伸 400mm。

    4)總重:10 

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