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雙室磁控光學鍍膜機

    詳細說明

    產品特點:

    該鍍膜機采用雙真空結構,包括準備室和工藝室,準備室與工藝室間安裝插板閥,維持工藝室在持續真空狀態。 

     準備室:配置阻抗式蒸發源,陽極層離子源,充氣系統,烘烤系統,磁懸浮分子泵,深冷冷阱。 
     工藝室:配置旋轉陰極孿生圓柱靶和大尺寸平面發射射頻ICP離子源,充氣系統,烘烤系統,兩組水平安 裝的磁懸浮分子泵,將濺射工作區域和離子源工作區域的氣氛隔離,深冷冷阱用于冷凝吸附水氣和揮發性氣體。
      整體移動公轉轉架,分體式工件掛具圍板。 
     前級真空由旋片泵、羅茨泵、維持泵組成。 


    主要技術參數

       1、成膜系統

    1) 中頻電源、旋轉陰極孿生圓柱靶。

    2)8舟阻抗式蒸發源。

    3) 射頻ICP離子源。 


       2、工作模式

    離子清洗、中頻磁控反應濺射,射頻離子源氧化或輔助 沉積,阻抗式蒸發,石英晶體薄膜厚度控制器監控膜厚 并自動判停。 


       3、工藝流程:

    進料 → 準備室(抽真空 → 烘烤、 離子清洗、除氣、活化)→ 工藝室(濺射沉積、離子輔助或離子 源氧化)→ 準備室(AF蒸發 → 進氣)→ 出料。


    4、材料成膜: 

    SiO2 - 中頻金屬性濺射+射頻離子源氧化。 

    Si3N4 - 中頻反應濺射+射頻離子源輔助。 

    Nb2O5 - 中頻金屬性濺射+射頻離子源氧化。 

    AF - 蒸發AF藥丸。

     

           5、功率:

    總功率 150KW,平均功率48KW。


       6、設備外尺寸及總重:

    1)安裝尺寸:10100L×4600W×3500H;

    2)含主體設備:4300L×2600W×3500H;

    3)機械泵組及控制柜2500L×4600W×2500H;

    4)轉架操作凈化區 3300L×600W×3000H;

    5)總重:15


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