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單室磁控濺射鍍膜機

    詳細說明


     產品特點:

      該鍍膜機采用立式箱體,前置室門上裝有觀察窗,底部中心驅動,頂部懸掛公轉轉架,分體式工件掛具 圍板,后置排氣法蘭連接分子泵,頂部安裝低溫冷凝泵。 
    1)前級真空:旋片泵、羅茨泵、維持泵構成。 
    2)高真空:分子泵、冷凝泵、超低溫冷凝水捕集泵(Polycold)。
    3)抽氣系統:由各級泵、管道和閥門,在系統的控制下完成啟動、粗抽、精抽、待命和維持流程。 

    主要技術參數:

    1、成膜系統:
    1) 中頻電源、旋轉陰極孿生圓柱靶*4對。
    2) 直流電源、旋轉陰極單圓柱靶*2套。
    3) 陽極層離子源*1套。 
    4) 蒸發源(10舟)*1套。 

    2、工作模式: 
    離子清洗、加熱蒸發,石英晶體薄膜厚度控制器監控膜厚并自動判停。 

    3、工藝流程:
    裝夾 - 抽真空- 離子清洗–磁控濺射–AF蒸發- 進氣、出爐。

    4、功率: 
    總功率170KW,平均功率60KW。 

    5、設備外尺寸及總重:
    1)設備外形尺寸:不開門W4900×D5000×H3300;開門W4900×D6600×H3300
    2)粗抽泵組及粗抽管占地:W2900×D2000。 
    3)主框架外部必要的操作和維護空間:水平方向外延伸800mm;垂直向上延伸 400mm。 
    4)總重:15噸。
    国内高清久久久久久,FREEEXXX性欧美,在厨房挺进市长美妇雪臀大宝,亚洲日韩第一页涩涩涩 <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <蜘蛛词>| <文本链> <文本链> <文本链> <文本链> <文本链> <文本链>